5

Pressure microsensor system using a closed-loop configuration

Year:
1994
Language:
english
File:
PDF, 395 KB
english, 1994
12

Fibre-optic sensors: A micro-mechanical approach

Year:
1989
Language:
english
File:
PDF, 848 KB
english, 1989
15

Etching roughness for (100) silicon surfaces in aqueous KOH

Year:
1991
Language:
english
File:
PDF, 1.47 MB
english, 1991
17

Micromachining of three-dimensional silicon structures using photoelectrochemical etching

Year:
1985
Language:
english
File:
PDF, 439 KB
english, 1985
27

Silicon microcavities fabricated with a new technique

Year:
1986
Language:
english
File:
PDF, 374 KB
english, 1986